3022 Series Accelerometer

3022 Series Accelerometer

Description: The Model 3022 is a piezoresistive silicon accelerometer packaged in a ceramic substrate with a sealed ceramic cover. The ceramic provides an excellent bonding surface for the customers application specific adhesive. The accelerometer consists of a micro machined silicon mass suspended by multiple beams from a silicon frame. Piezoresistors located in the beams change their resistance as the motion of the suspended mass changes the strain in the beams. Silicon caps on the top and bottom of the device are added to provide overrange stops. This design provides for a very low profile, high shock resistance, durability and built-in damping over a wide usable bandwidth. For an accelerometer with a mounting bracket designed to bolt the sensor to a mounting location, see the Model 3028. Please refer to the Models 3052 and 3058 for accelerometers with integral temperature compensation.

Features:
• Piezoresistive MEMS
• PC board mountable accelerometer
• Millivolt output
• Low cost
• Designed for PCB or adhesive mounting
• ±0.5% non-linearity (typical)
• DC response
• Gas damping
• Built-in over-range stops
• Low power

Parameters
DYNAMIC

Range (g) ±2 ±5 ±10 ±20 ±50 ±100 ±200
Sensitivity (mV/g)1
8.0-20.0 6.0-15.0 3.0-6.0 1.5-3.0 0.6-1.5 0.3-0.6 0.15-0.3 @5Vdc Excitation
Frequency Response (Hz) 0-150 0-250 0-400 0-600 0-1000 0-1500 0-2000 ±5%
Natural Frequency (Hz) 700 800 1000 1500 4000 6000 8000
Non-Linearity (%FSO) ±0.5 ±0.5 ±0.5 ±0.5 ±0.5 ±0.5 ±0.5
Transverse Sensitivity (%) 3 3 3 3 3 3 3
Damping Ratio 0.7 0.7 0.7 0.7 0.7 0.7 0.6
Shock Limit (g) 5000 5000 5000 5000 5000 5000 5000

ELECTRICAL
Zero Acceleration Output (mV): ±25 ±25 ±25 ±25 ±25 ±25 ±25 Differential
Excitation Voltage (Vdc): 2 to 10 2 to 10 2 to 10 2 to 10 2 to 10 2 to 10 2 to 10
Input Resistance (Ω): 2500- 6500 2500- 6500 2500- 6500 2500- 6500 2500- 6500 2500- 6500 2500- 6500

Output Resistance (Ω): 2500- 6500 2500- 6500 2500- 6500 2500- 6500 2500- 6500 2500- 6500 2500- 6500

Insulation Resistance (MΩ): >100 >100 >100 >100 >100 >100 >100 @50Vdc
Residual Noise (µV RMS): 10 10 10 10 10 10 10 Maximum
Ground Isolation: Isolated from Mounting Surface

ENVIRONMENTAL
Thermal Zero Shift (%FSO/°C): -0.09 -0.09 -0.09 -0.09 -0.09 -0.09 -0.09 Typical Thermal Sensitivity Shift (%/°C): -0.15 -0.15 -0.15 -0.15 -0.15 -0.15 -0.15 Typical Operating Temperature (°C): -40 to +125
Compensated Temperature (°C): Not Compensated See Note 2
Storage Temperature (°C): -40 to +125

PHYSICAL
Case Material: Ceramic
Weight (grams): 3.1
Mounting: Adhesive or solder

1 Output is ratiometric to excitation voltage
2 Order model 3022-XXX-10254 for temperature compensation resistor values included in the calibration certificate